SEMI-GAS® Systems Updates Semi Automatic Valve Manifold Box Design - SEMI-GAS Systems recently introduced a new line of semi automatic valve manifold boxes that facilitate pressure regulated gas delivery to multiple points-of-use and feature a compact design and new PLC based controller.
SEMI-GAS® Systems Updates Semi Automatic Valve Manifold Box Design
By SEMI-GAS Systems
Sep 20, 2011 - 3:51:36 PM
SEMI-GAS® Systems, a division of
Applied Energy Systems, Inc,
and a manufacturer of industry-leading ultra-high purity gas source and
distribution systems, recently introduced a new line of semi
automatic valve manifold boxes that facilitate pressure regulated gas
delivery to multiple points-of-use and feature a compact design and new PLC based controller. The new valve
manifold boxes (VMBs) reduce cost, space requirements, high purity piping, utility
demands and points of toxic gas monitoring when gas usage does not justify
multiple gas cabinets.
SEMI-GAS Systems' new semi automatic valve manifold box
Each new valve manifold box features a new GSM series controller.
Four line semi automatic VMBs include the new
GSM-VS4 controller, which replaces the now obsolete GSM 1x4 controller. The GSM-VS4
controller, benefitting from modern PLC-based
technology, independently operates emergency shutoff valves, monitors input
from the excess flow switches and displays delivery pressures. Local emergency
shutdown via an emergency off (EMO) button and remote shutdown capabilities are
standard, as well as other networking and communication signals.
Available in 4, 6 and 8 stick designs, as well as
customized mini and expanded versions, the new valve manifold boxes incorporate
an automatic emergency shut off (ESO) valve on each distribution stick. This
ensures that each process gas is safely and continuously distributed from the
gas source to various tools and points-of-use as needed in semiconductor, LED
or wafer production and research and development environments.
SEMI-GAS®
Systems’ upgraded semi automatic valve manifold boxes feature a rail-mounted
stick design for easy maintenance and expansion to accommodate FAB additions, process changes and new tool
installations. Individual process sticks are pressure regulated and the lines
are isolated for localized gas control. Pressure can be monitored using gauges,
indicating pressure switches or transducers.
The system is continually monitored
for alarms to ensure the safest operating conditions. The GSM-VS4 controller
will automatically shut the system down in the event of an alarm. The valve
manifold boxes also feature an ergonomically-positioned color touch screen
interface to display the system schematic and relevant operating conditions.
LED lights provide constant system status.
The valve manifold box enclosure is
constructed of welded 11 Ga steel, with a 1/4" thick safety glass window
and a self-closing, self-latching door.
The
4 stick model is 44” tall, 22” wide and 15” deep. A UL-approved fire sprinkler
is also included. Each valve manifold box also features integrated wall or rack
mount attachment points.
A wide array of features and
options are available to create custom VMBs for specific application requirements.
For more information contact Megan Kasper at
mkasper@semi-gas.com or 610-647-8744.
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